| Laser dicing refers to cutting workpieces once or back and forth multiple times along designated positions using a focused laser beam. The focused laser beam features a tiny focal spot and high energy density, which continuously vaporizes the workpiece material to form ultra-narrow kerfs. Three key performance indicators of laser dicing machines are scribing speed, reciprocating scribing repeatability, and focal spot quality. Processing efficiency is jointly affected by scribing speed and reciprocating scribing repeatability. Among them, reciprocating scribing repeatability is particularly critical to the process stability of multi-pass reciprocating scribing. Focal spot quality exerts a direct impact on kerf quality. Superior focal spot quality helps reduce chipping and heat-affected zones, thereby improving cutting edge finish. Targeting these three core indicators, PSI has launched two series of galvanometers specially designed for laser dicing: the PSH14 and PSH20 series. | |
PSI advantages: PSI galvo Surface accuracy≤1/4λ to ensure the quality of the focal spot PSH14 series high-speed galvo, speed≤15m/s (F254), round-trip coincidence≤10um, PSH20 series high-speed galvo, speed≤12m/s (F254), round-trip coincidence≤10um. The speed of these two series of special scribing galvanometers has reached the highest level in the industry at present under the condition of ensuring the round-trip coincidence ≤10um. |  |
