The PSH14AW scanning head is developed for high-precision and high-speed laser processing. It features wide process compatibility and long-term operational stability, catering to various demanding laser processing requirements.
High Precision: Delivers accurate scanning positioning, ideal for micro-structure machining, drilling and other fine processing tasks.
High Speed: Ensures fast response to shorten cycle time and improve production efficiency.
Low Thermal Drift: Boasts excellent thermal stability and reduces scanning deviation caused by temperature rise.
High Reliability: Adopts a durable structure to support long-duration continuous and stable operation.
Application Fields
The PSH14AW 2D scanning head is widely used in multiple application scenarios, including material processing, multi-head combined processing, micro-structure machining and drilling in the semiconductor industry, as well as high-speed laser cleaning, cladding, flying processing, scribing, cutting and solar industry applications.
Mechanical Drawing
| Legend: 1.Laser Inlet 2.Electrical Interface (XY2-100, Power Input) 3.Water Cooling Inlet 4.Water Cooling Outlet 5.Laser Outlet (Unit: mm) |
PSH14AW scanning head | |
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Input Plate & Mounting Plate | Output Plate |
Specifications
PSH14AW | Specifications |
Maximum allowed average laser power(1) | 500 W |
Cooling | Water |
Aperture | 14 mm |
Effective scan angle(2) | ± 10° |
Tracking error | ≤0.15ms |
Step response | ≤0.36 ms |
Speed | |
Positioning / Jump(3) | ＜30m/s |
Line scan(3) | ＜30 m/s |
Vector scan(4) | ＜3 m/s |
Good writing quality(3)(5) | 750 cps |
Precision | |
Linearity | 99.9% |
Repeatability | 2 μrad |
Temperature drift | |
Offset | 15 μrad/℃ |
Gain | 15 μrad/℃ |
Long time drift(after 30 mins warm up) | |
Over 8 hours long-term offset drift | 25 μrad |
Over 8 hours long-term gain drift | 40 μrad |
Operating temperature range | 25 ℃ ± 10 ℃ |
Signal interface | Analog:± 10 V or ± 5 V |
Digital:XY2-100 or PRS422 | |
Input power requirement(DC) | ± 15 V @ 5 A Max RMS |
Volume | 118mm×165mm×145mm |
Note:
(1) For laser wavelength 1030-1090 nm.
(2) All angles are in mechanical degrees.
(3) With F-Theta objective f = 160 mm. Speed value varies correspondingly with different focal lengths.
(4) Reapeatibility and temperature drift are measured within this speed.
(5) Single-stroke font with 1 mm height.
