The PSH14AW scanning head is developed for high-precision and high-speed laser processing. It features wide process compatibility and long-term operational stability, catering to various demanding laser processing requirements.
High Precision: Delivers accurate scanning positioning, ideal for micro-structure machining, drilling and other fine processing tasks.
High Speed: Ensures fast response to shorten cycle time and improve production efficiency.
Low Thermal Drift: Boasts excellent thermal stability and reduces scanning deviation caused by temperature rise.
High Reliability: Adopts a durable structure to support long-duration continuous and stable operation.
Application Fields
The PSH14AW 2D scanning head is widely used in multiple application scenarios, including material processing, multi-head combined processing, micro-structure machining and drilling in the semiconductor industry, as well as high-speed laser cleaning, cladding, flying processing, scribing, cutting and solar industry applications.
Mechanical Drawing（Unit of dimension: mm）
 | Legend: 1.Laser Inlet 2.Electrical Interface (XY2-100, Power Input) 3.Water Cooling Inlet 4.Water Cooling Outlet 5.Laser Outlet |
| PSH14AW | |
 |  |
| Input Plate & Mounting Plate | Output Plate |
Specifications
PSH14AW | Specifications |
Maximum allowed average laser power(1) | 500 W |
Optional adaptable wavelengths(8) | 355nm；532nm；1030-1090nm |
Cooling | Water |
Aperture | 14 mm |
Effective scan angle(2) | ± 10° |
Tracking error | ≤0.15ms |
Step response | ≤0.36 ms |
Speed | |
Positioning / Jump(3) | ＜30m/s |
Line scan(3) | ＜30 m/s |
Vector scan(4) | ＜3 m/s |
Good writing quality(3)(5) | 750 cps |
Precision | |
Linearity | 99.9% |
Repeatability | 2 μrad |
Temperature drift | |
Offset | 15 μrad/℃ |
Gain | 15 μrad/℃ |
Long time drift(after 30 mins warm up) | |
Over 8 hours long-term offset drift | 25 μrad |
Over 8 hours long-term gain drift | 40 μrad |
Operating temperature range | 25 ℃ ± 10 ℃ |
Signal interface | Analog:± 10 V or ± 5 V |
Digital:XY2-100 or PRS422 | |
Input power requirement(DC) | ± 15 V @ 5 A Max RMS |
Volume | 118mm×165mm×145mm |
Note:
(1) For laser wavelength 1030-1090 nm.
(2) All angles are in mechanical degrees.
(3) With F-Theta objective f = 160 mm. Speed value varies correspondingly with different focal lengths.
(4) Reapeatibility and temperature drift are measured within this speed.
(5) Single-stroke font with 1 mm height.
(6) The long-term thermal drift test shall be carried out under a constant ambient temperature of approximately 25 °C, with the laser power kept below 500 W. High laser power shall not be adopted for thermal drift testing. Under high laser power, thermal distortion will occur in both the optical system and mechanical system. Consequently, it cannot be determined whether the measured drift originates from the inherent drift of the galvo scanner or from thermal deformation of the optical and mechanical systems.
(7) Appropriate delay parameters must be configured for normal operation of the galvo scanner. Failure to do so may result in abnormal operation of the galvo motor and even irreversible damage to the motor! Please contact PSI engineers regarding relevant parameter configuration issues.
(8) Wavelength customization available. Please consult PSI engineers!