PSH14ART is the ideal product for laser processing applications that require extremely high precision. It is perfectly suitable for applications demanding the curvature accuracy of less than ±0.5 μm and a line spacing accuracy of less than ±1 μm, for example, high-precision resistor trimming, etc.
The product has extremely high positioning accuracy, outstanding scan line straightness and lowest temperature drift value.
PSH14ART | Specifications | |
Maximum allowed average laser power(1) | 100 W | |
Aperture | 14 mm | |
Effective scan angle(2) | ± 10° | |
Tracking error | ≤0.4 ms | |
Step response | ≤1 ms | |
Speed | ||
Positioning / Jump(3) | ＜10 m/s | |
Line scan(3) | ＜10 m/s | |
Vector scan(4) | ＜1.2 m/s | |
Good writing quality(3)(5) | 300 cps | |
Precision | ||
Linearity | 99.9 % | |
Repeatability | 2 μrad | |
Temperature drift | ||
Offset(μrad/℃) | 15 | |
Gain(μrad/℃) | 15 | |
Long time drift(after 30 mins warm up) | ||
Over 8 hours long-term offset drift(μrad) | 25 | |
Over 8 hours long-term gain drift(μrad) | 40 | |
Operating temperature range | 25 ℃ ± 10 ℃ | |
Signal interface | Analog:± 10 V or ± 5 V | |
Digital:XY2-100 or PRS422 | ||
Input power requirement(DC) | ± 15 V @ 5 A Max RMS | |
Volume | 107.5mm×156mm×119.5mm | |
Note:
(1) For laser wavelength 1030-1090 nm.
(2) All angles are in mechanical degrees.
(3) With F-Theta objective f = 160 mm. Speed value varies correspondingly with different focal lengths.
(4) Reapeatibility and temperature drift are measured within this speed.
(5) Single-stroke font with 1 mm height.